Proceedings of the ... European Conference on Chemical Vapor Deposition
The resistivity and step coverage are very good and allow to use this material in the futur microelectronic technologies. The quite low ... 70/71(1993) 763 [2] MARTINEZ-DUART J.M. and ALBELLA J.M., Vacuum, 39( 1989) 749. [3] COHEN S.L.anbsp;...
| Title | : | Proceedings of the ... European Conference on Chemical Vapor Deposition |
| Author | : | |
| Publisher | : | - 1995 |
You must register with us as either a Registered User before you can Download this Book. You'll be greeted by a simple sign-up page.
Once you have finished the sign-up process, you will be redirected to your download Book page.
How it works:- 1. Register a free 1 month Trial Account.
- 2. Download as many books as you like (Personal use)
- 3. Cancel the membership at any time if not satisfied.
